TUBE FURNACE

  The vertical tubular electric furnace is produced by juxing kiln, which has an advanced and reasonable structure and is widely used in film growth, electrode test, oxide crystal growth, annealing, and other new technological fields. CVD control system is composed of vacuum and gas path control, which is used in the field of preparing graphene by vapor deposition etc.

  The CVD system composed of a vertical tubular electric furnace is composed of deposition temperature control, deposition reaction chamber, vacuum control parts and gas source control spare parts, etc. It can also be designed and produced according to user needs. CVD system is mainly used in the carbon nanomaterials preparation industry and is now being used in many industries. Including nanoelectronics, semiconductor, optoelectronic engineering research and development, coatings, and other fields.

  The automatic power-off function of the door of the vertical tube electric furnace can automatically power off after the door is opened. Over-temperature protection function, when the temperature exceeds the allowable set value, automatic power off, and alarm. Leakage protection function, when the furnace body leakage power automatically. The above functions ensure the safety of use.

Standard features

• The fast connection flange structure is adopted in the gas connection way.

• To simplify the material taking and releasing process, only one clamp can complete the air connection, convenient operation.

• The complicated flange installation process is eliminated, reducing the possibility of furnace tube damage due to installation.

• Furnace chamber material is made of high-quality ceramic fiber material, more energy-saving, even temperature field.

• The electric heating element adopts high resistance high-quality alloy wire 0Cr27Al7Mo2（Sic & Mosi2).

• According to the different processes of customers, a variety of furnace tube materials for customers to choose from (stainless steel, quartz, silicon carbide, corundum, etc.)

• With PID regulation, fuzzy control, self-setting functions, and can work out various rising and cooling programs.

• The domestic temperature controller can edit 30 section program temperature control, imported temperature controller can edit 50 section program temperature control.

  Options (specify these at time of order)

• Vacuum control system. Through various vacuum control systems, samples can be tested in low, medium, and high vacuum environments.

• The air intake is adjusted by float or mass flow controller to meet the experimental requirements of users in different reaction atmosphere or protective atmosphere conditions.
  

*Content may be subject to modifications or corrections